COURSE UNIT TITLE

: MECHANICAL PROPERTIES OF THIN FILMS

Description of Individual Course Units

Course Unit Code Course Unit Title Type Of Course D U L ECTS
MME 6005 MECHANICAL PROPERTIES OF THIN FILMS ELECTIVE 3 0 0 7

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

Offered to

Nanoscience and Nanoengineering
Nanoscience and Nanoengineering
M.Sc. Metallurgical and Material Engineering
Metallurgical and Material Engineering
Nanoscience and Nanoengineering
Metallurgical and Material Engineering

Course Objective

The students having passed the exam in this course should have a deep understanding of The students having passed the exam in this course should have a deep understanding of selected topics in mechanical properties of thin films and should also be able to use this knowledge on own research problems. The aim of this course is to give the students an overview of mechanical properties of thin films. At the beginning thin film definition and its elastic and plastic deformation behavior are introduced followed by the description of the fracture behavior of thin films. The outline of thin film deflections and stresses are described with the compaction problems and suggested solutions. Nanoindentation, basic hardness testing, pile-up and sink-in are explained. As a final outline of scratch method is given

Learning Outcomes of the Course Unit

1   Will be able to identify thin films and behavior of mechanics
2   Will be able to calculate elastic, plastic and fracture of thin films
3   Will be able to identify and measure stresses of thin films
4   Will be able to do mechanic tests of thin films
5   Will be able to calculate residaul stresses of thin films

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Week Subject Description
1 Thin film definitions
2 Mechanical Behavior of Problems
3 Introduction to Sources of Stresses in Thin Films
4 Stress Diagram, Calculation of Film Stresses from Misfit Strain, Position of the Neutral Plane for Bending
5 Mechanical Behavior of thin films
6 Measurement of Stresses in Thin Films
7 1. Midterm exam
8 Stresses in Polycrystalline Films
9 Strain Distribution in Thin Films
10 Wafer Curvature Methods
11 Buckling Technique for Measuring Compressive Stresses in Films
12 Equivalent Stress- Equivalent Plastic Strain Curve
13 2. Midterm exam
14 Nanoindentation tests

Recomended or Required Reading

1.Mechanical Properties of Thin Films, William D. Nix, Stanford University, Stanford, 2005.
2.Nano Mechanics and Materials, Wing Kam Liu, Eduard G. Karpov, Harold S. Park, John Wiley& Sons, Ltd, USA, 2006

Planned Learning Activities and Teaching Methods

Lecture, homework, midterm exams

Assessment Methods

SORTING NUMBER SHORT CODE LONG CODE FORMULA
1 MTE 1 MIDTERM EXAM 1
2 MTE 2 MIDTERM EXAM 2
3 ASG ASSIGNMENT
4 FIN FINAL EXAM
5 FCG FINAL COURSE GRADE MTE 1 * 0.20 + MTE 2 * 0.20 + ASG * 0.10 + FIN * 0.50
6 RST RESIT
7 FCGR FINAL COURSE GRADE (RESIT) MTE 1 * 0.20 + MTE 2 * 0.20 + ASG * 0.10 + RST * 0.50


*** Resit Exam is Not Administered in Institutions Where Resit is not Applicable.

Further Notes About Assessment Methods

Semester requirements are 2 mid-term exam and homeworks

Assessment Criteria

Program outcomes related with the questions on the exam paper are stated

Language of Instruction

Turkish

Course Policies and Rules

Precipitation to the course is important and it should be min.70%.

Contact Details for the Lecturer(s)

Office tel.: 0232 301 7463
Mail : mustafa.toparli@deu.edu.tr

Office Hours

Tuesday 13.00-17.00

Work Placement(s)

None

Workload Calculation

Activities Number Time (hours) Total Work Load (hours)
Lectures 12 3 36
Preparations before/after weekly lectures 12 3 36
Preparation for midterm exam 2 15 30
Preparation for final exam 1 20 20
Preparing assignments 6 7 42
Midterm 2 2 4
Final 1 2 2
TOTAL WORKLOAD (hours) 170

Contribution of Learning Outcomes to Programme Outcomes

PO/LOPO.1PO.2PO.3PO.4PO.5PO.6PO.7PO.8PO.9PO.10PO.11PO.12PO.13PO.14
LO.144332143334322
LO.234332143334322
LO.344332143334322
LO.434332243334322
LO.544331143334322