COURSE UNIT TITLE

: MINIATURIZATION

DEGREE PROGRAMMES

Description of Individual Course Units

Course Unit Code Course Unit Title Type Of Course D U L ECTS
NNE 5017 MINIATURIZATION ELECTIVE 3 0 0 8

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

Offered to

Nanoscience and Nanoengineering
Nanoscience and Nanoengineering
Nanoscience and Nanoengineering

Course Objective

The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This course brings an understanding of manufacturing options, material choices, and size. The miniaturization area studied in the book shows top-down methods that are built from large to small and bottom-up methods built from small to large

Learning Outcomes of the Course Unit

1   To know the fundamentals of microfabrication
2   To know the manufacturing techniques and parameters of miniaturization
3   To choose the right miniaturization technique for the end product
4   To decide measuring and characterization techniques in miniaturized systems
5   To understand the manufacturing options, material choices, and size in miniaturization

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Week Subject Description
1 Different techniques used in Lithography and the latest lithography tools for nanofabrication or nanomachining
2 Dry-etchetching techniques for pattern transfer used in miniaturization and IC technology
3 Additive pattern transfer techniques for thin film and thick film deposition
4 A type of miniaturization in sensor and sensor systems involving single-crystal materials called wet bulk micromachining
5 Thin-film additive techniques with etching (both wet and dry) as surface micromachining
6 Midterm exam
7 LIGA, a tool based on deep x-ray lithography, electrodeposition, and micromolding as cost effective methods used in microfabrication
8 Miniaturization tools and biotechnology
9 Installation of a brain in miniaturized systems
10 Scaling, actuation and the powering of miniaturized systems
11 Overview of the present and impending applications as well as opportunities of using microfabrication techniques in science and engineering
12 Student presentations
13 Student presentations
14 Student presentations

Recomended or Required Reading

TEXTBOOK : Marc J. Madou, Fundamentals of Microfabrication, The Science of Miniaturization , 2nd edition, ISBN 0-8493-0826-7, 2002.

REFERENCE BOOKS : Royal Society of Chemistry, Ed. By S. Le Gac and A. van den Berg, Miniaturization and Mass Spectroscopy , ISBN 978-0-85404-129-9, RSC Publishing, 2009.

Planned Learning Activities and Teaching Methods

The course is taught in a lecture, class presentation and discussion format. All class members are expected to attend and both the lecture and seminar hours and take part in the discussion sessions. Besides the taught lecture, group presentations are to be prepared by the students assigned for that week and presented to open a discussion session.

Assessment Methods

SORTING NUMBER SHORT CODE LONG CODE FORMULA
1 MTE MIDTERM EXAM
2 ASG ASSIGNMENT
3 FIN FINAL EXAM
4 FCG FINAL COURSE GRADE MTE * 0.25 + ASG *0.25 +FIN *0.50
5 RST RESIT
6 FCGR FINAL COURSE GRADE (RESIT) MTE * 0.25 + ASG *0.25 +RST *0.50


*** Resit Exam is Not Administered in Institutions Where Resit is not Applicable.

Further Notes About Assessment Methods

None

Assessment Criteria

- Midterm Exams (25 %)
- Final Exam (50 %)
- Term Paper (25 %)

Language of Instruction

Turkish

Course Policies and Rules

To be announced.

Contact Details for the Lecturer(s)

murat.kusoglu@deu.edu.tr

Office Hours

Friday, 10:00-12:00

Work Placement(s)

None

Workload Calculation

Activities Number Time (hours) Total Work Load (hours)
Lectures 13 3 39
Preparations before/after weekly lectures 13 7 91
Preparation for midterm exam 1 20 20
Preparation for final exam 1 20 20
Preparing presentations 1 20 20
Final 1 2 2
Midterm 1 2 2
TOTAL WORKLOAD (hours) 194

Contribution of Learning Outcomes to Programme Outcomes

PO/LOPO.1PO.2PO.3PO.4PO.5PO.6PO.7
LO.12311122
LO.21112131
LO.35511551
LO.44411245
LO.51153214

CONTACT INFORMATION
Dokuz Eylül Üniversitesi Cumhuriyet Bulvarı No: 144 35210 Alsancak / İZMİR
Phone: +90(232) 412 12 12 - Fax: +90 (232) 464 81 35

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