COURSE UNIT TITLE

: FABRICATION TECHNIQUES IN NANOTECHNOLOGY

DEGREE PROGRAMMES

Description of Individual Course Units

Course Unit Code Course Unit Title Type Of Course D U L ECTS
NNE 5047 FABRICATION TECHNIQUES IN NANOTECHNOLOGY ELECTIVE 3 0 0 8

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

ASSOCIATE PROFESSOR METIN YURDDAŞKAL

Offered to

Nanoscience and Nanoengineering

Course Objective

The fabrication techniques are one of the important aspects in the nano-science and nano-technology. There are basically two common methods in fabrication of nano systems/ devices: bottom-up and top-down approaches. The aim of this course is to introduce the fabrication alternatives covering both methods. Particularly, product-oriented fabrication technologies in nano-technology will be presented with some examples.

Learning Outcomes of the Course Unit

1   To learn thin film deposition techniques
2   To learn surface modification techniques
3   To learn fabrication nano and micro-sized topography on surface
4   Methodology of choosing in processes, materials and technology for nanofabrication
5   To learn systematic approaches for integrated nano-system fabrication

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Week Subject Description
1 Introduction to Nanosystems and Nanodevices Fabrication from micro- to nanotechnology
2 Basic Thin Film Growth and Processes Sol-gel, PVD, CVD, surfaces and interfaces
3 Advanced Thin Film Growth and Processes Atomic Layer Film Growth (ALD), MOCVD, Pulsed Laser Deposition for nanofabrication
4 Diffusion processes Ion implantation and oxidation
5 Optical and e-beam lithography, mask technology
6 Nanobased approaches in lithography-1
7 Nanobased approaches in lithography-2
8 Processing on polymers and ceramics
9 Principles on process integration
10 Nano-fiber fabrication and its design parameters
11 Nano-fabrication processes for Integrated Circuit Technology
12 Nano-fabrication processes for Integrated Circuit Technology-2
13 Homework/presentations
14 Homework/presentations

Recomended or Required Reading

1. Cui, Z., Nanofabrication: Principles, Capabilites and Limits, Springer, ISBN: 978-0-387-75576-2, 2008.
2. Andrady, A.L., Science and Technology of Polymer Nanofibers, John Wiley&Sons, Inc, ISBN 978-0-471-79059-4, 2008.
3. Bhusban, B., Springer Handbook of Nanotechnology, Springer, ISBN: 978-3-540-29855-7, 2007.
4. Jackson, M.J., Microfabrication and Nanomanufacturing, CRC Press, ISBN: 0-8247-2431-3, 2006.
5. Gogotsi, Y., Nanotubes and Nanofibers, Taylor & Francis, ISBN 0-8493-9387-6, 2006.
6. Franssila, S., Introduction to Microfabrication, John Wiley & Sons Ltd, ISBN:0-4708-5105-8, 2004.

Planned Learning Activities and Teaching Methods

This course will be given by visual expression, discussion and presentation applications.

Assessment Methods

SORTING NUMBER SHORT CODE LONG CODE FORMULA
1 MTE 1 MIDTERM EXAM 1
2 MTE 2 MIDTERM EXAM 2
3 ASG ASSIGNMENT
4 FIN FINAL EXAM
5 FCG FINAL COURSE GRADE MTE 1 * 0.15 +MTE 2 * 0.15 +ASG * 0.20 +FIN * 0.50
6 RST RESIT
7 FCGR FINAL COURSE GRADE (RESIT) MTE 1 * 0.15 +MTE 2 * 0.15 +ASG * 0.20 +RST * 0.50


Further Notes About Assessment Methods

None

Assessment Criteria

The performance evaluations of the students will be performed by taking the mid-terms, final exam and term paper presentations based on the learning outcomes (LO1. LO2, LO3, LO4, LO5).
Mid-term exam 1 (%15) + Mid-term exam 2 (%15) + Homework Assignments/Presentation (%20) + Final (%50)

Language of Instruction

Turkish

Course Policies and Rules

Attendance to the course is compulsory at least 70% in the term.

Contact Details for the Lecturer(s)

Assoc. Prof. Dr. Metin YURDDAŞKAL
metin.yurddaskal@deu.edu.tr
02323017460

Office Hours

Friday 10:00 - 12:00

Work Placement(s)

None

Workload Calculation

Activities Number Time (hours) Total Work Load (hours)
Lectures 12 3 36
Preparations before/after weekly lectures 12 3 36
Preparation for midterm exam 2 15 30
Preparation for final exam 1 30 30
Preparing assignments 2 16 32
Preparing presentations 2 16 32
Final 1 2 2
Midterm 2 1 2
TOTAL WORKLOAD (hours) 200

Contribution of Learning Outcomes to Programme Outcomes

PO/LOPO.1PO.2PO.3PO.4PO.5PO.6PO.7
LO.144343
LO.2354533
LO.3553434
LO.43534535
LO.5454544

CONTACT INFORMATION
Dokuz Eylül Üniversitesi Cumhuriyet Bulvarı No: 144 35210 Alsancak / İZMİR
Phone: +90(232) 412 12 12 - Fax: +90 (232) 464 81 35

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