COURSE UNIT TITLE

: NANOLITOGRAPHY

DEGREE PROGRAMMES

Description of Individual Course Units

Course Unit Code Course Unit Title Type Of Course D U L ECTS
NNE 5013 NANOLITOGRAPHY ELECTIVE 3 0 0 8

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

ASSOCIATE PROFESSOR METIN YURDDAŞKAL

Offered to

Nanoscience and Nanoengineering
Nanoscience and Nanoengineering
Nanoscience and Nanoengineering

Course Objective

The aim of this course is to introduce the central concepts of nanolithography, provide an explanation of the fundamental principles and example applications of nanolithography techniques. Course covers first traditional techniques, including electron beam lithography, focused ion beam, plasma-assisted pattern transfer, optical lithography, and soft x-ray lithography. Then describes new and emerging methods, such as nanoimprint lithography, scanning probe lithography, two-photon lithography, self assembly, plasmonic nanolithography, and deterministic doping. Finally discusses how nanofabrication processes are used in electronics.

Learning Outcomes of the Course Unit

1   Describe the fundamental principles of lithography
2   Provide an understanding of traditional and emerging techniques of lithography
3   List the potential applications of lithography techniques in electronics
4   Research recent scientific studies and applications about lithography
5   Interprate lithography applications

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Week Subject Description
1 Introduction to Nanolithography
2 Electron Beam Lithography
3 Nanolithography with Focused Ion Beams
4 Focused Ion Beam and Electron Beam Deposition
5 Plasma-Assisted Pattern Transfer at the Nanoscale
6 Optical Lithography
7 Mid-Term examination
8 Soft X-Ray Lithography
9 New Lithographic Techniques
10 EBL Processes examples
11 Student projects
12 Student projects
13 Student projects
14 Student projects

Recomended or Required Reading

Nano-lithography, Stefan Landis, Wiley.
Nanofabrication: Techniques and Principles, Stepanova, Maria; Dew, Steven, Springer.

Planned Learning Activities and Teaching Methods

Lectures with presentations, mid-term and final exam, student group studies and presentations.

Assessment Methods

SORTING NUMBER SHORT CODE LONG CODE FORMULA
1 MTE MIDTERM EXAM
2 ASG ASSIGNMENT
3 FIN FINAL EXAM
4 FCG FINAL COURSE GRADE MTE * 0.25 + ASG *0.25 +FIN *0.50
5 RST RESIT
6 FCGR FINAL COURSE GRADE (RESIT) MTE * 0.25 + ASG *0.25 +RST *0.50


Further Notes About Assessment Methods

None

Assessment Criteria

All learning outcomes will be assessed with mid-term and final exam, student presentations.

Language of Instruction

Turkish

Course Policies and Rules

To be announced.

Contact Details for the Lecturer(s)

Assoc. Prof. Dr. Metin YURDDAŞKAL
Dokuz Eylul University
Faculty of Engineering
Department of Metallurgy and Materials Engineering
Tinaztepe Campus Buca IZMIR
Mail: metin.yurddaskal@deu.edu.tr

Office Hours

Will be announced during the semestre.

Work Placement(s)

None

Workload Calculation

Activities Number Time (hours) Total Work Load (hours)
Lectures 13 3 39
Preparations before/after weekly lectures 13 2 26
Preparation for midterm exam 1 20 20
Preparing assignments 1 40 40
Preparing presentations 1 30 30
Preparation for final exam 1 30 30
Midterm 1 2 2
Final 1 2 2
TOTAL WORKLOAD (hours) 189

Contribution of Learning Outcomes to Programme Outcomes

PO/LOPO.1PO.2PO.3PO.4PO.5PO.6PO.7
LO.11125241
LO.22154552
LO.33313433
LO.44451324
LO.55541111

CONTACT INFORMATION
Dokuz Eylül Üniversitesi Cumhuriyet Bulvarı No: 144 35210 Alsancak / İZMİR
Phone: +90(232) 412 12 12 - Fax: +90 (232) 464 81 35

Copyright 2015 DEÜ. BİD

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