COURSE UNIT TITLE

Offered By

Graduate School of Natural and Applied Sciences

Level of Course Unit

Second Cycle Programmes (Master's Degree)

Course Coordinator

ASSOCIATE PROFESSOR METIN YURDDAŞKAL

Offered to

Nanoscience and Nanoengineering
Nanoscience and Nanoengineering
Nanoscience and Nanoengineering

Course Objective

The objective of this course is to introduce nanolithography, explain its fundamental principles, and provide examples of nanolithography techniques. It also provides information on traditional techniques such as electron beam lithography, plasma-based pattern transfer, optical lithography, and X-ray lithography. It also describes newer methods such as nanoimprint lithography, scanning lithography, two-photon lithography, plasma nanolithography, and decisive doping, as well as providing information on the electronic applications of nanofabrication processes.

Learning Outcomes of the Course Unit

Mode of Delivery

Face -to- Face

Prerequisites and Co-requisites

None

Recomended Optional Programme Components

None

Course Contents

Recomended or Required Reading

Nano-lithography, Stefan Landis, Wiley.
Nanofabrication: Techniques and Principles, Stepanova, Maria; Dew, Steven, Springer.

Planned Learning Activities and Teaching Methods

Lectures with presentations, mid-term and final exam, student group studies and presentations.

Assessment Methods

Further Notes About Assessment Methods

None

Assessment Criteria

All learning outcomes will be assessed with mid-term and final exam, student presentations.

Language of Instruction

Turkish

Course Policies and Rules

To be announced.

Contact Details for the Lecturer(s)

Assoc. Prof. Dr. Metin YURDDAŞKAL
Dokuz Eylul University
Faculty of Engineering
Department of Metallurgy and Materials Engineering
Tinaztepe Campus Buca IZMIR
Mail: metin.yurddaskal@deu.edu.tr

Office Hours

Will be announced during the semestre.

Work Placement(s)

None

Workload Calculation

Contribution of Learning Outcomes to Programme Outcomes